EURAMET features as a news story the development of new optical humidity measurement methods achieved through the EMPIR PROMETH2O project (Metrology for trace water in ultra-pure process gases), which has improved the metrological traceability of trace water measurements in ultra-pure gases.
Trace water (water vapor) is the primary contaminant in ultra-pure process gases such as argon, nitrogen, and hydrogen. Its presence affects the quality of high-tech products, such as semiconductors and pharmaceuticals, but until now, measurements in this field lacked adequate metrological traceability.
To address this issue, the PROMETH2O project has developed advanced optical methods capable of detecting minimal amounts of water down to a few parts per billion (ppb). Thanks to this research, Qrometric, a PROMETH2O project partner, has validated its frost point generator, capable of accurately reaching temperatures as low as -100°C, an unprecedented range for any commercial portable calibrators.
This unique instrument enables, for the first time, in-situ calibration of humidity sensors with unparalleled precision. With a validated temperature measurement range of -100 °C to 0 °C and an accuracy between 0.5 °C to 0.05 °C, this instrument is capable of measurements at temperatures lower than most primary calibration standards, enhancing quality control in key sectors such as microelectronics and the pharmaceutical industry, while also increasing product reliability.
This achievement highlights the impact of European metrology research in supporting industrial needs with high-precision measurement solutions.
This EMPIR project is co-funded by the European Union's Horizon 2020 research and innovation programme and the EMPIR Participating States.