The laboratory provides a wide range of calibration and measurement services, which guarantee traceability to the International System of Units for dimensional measurements on a micro and nanometric scale.
The laboratory is equipped with instruments for micro- and nanoscale surface analysis, including a stylus profilometer, an optical profilometer, a focus variation measuring machine, a chromatic confocal point sensor, a diffractometer, a bench-top scanning electron microscope (SEM) and a metrological atomic force microscope (mAFM).
The instruments that provide traceability to the International System of Units are the stylus profilometer, the optical diffractometer and the mAFM, which are used to calibrate roughness standards, groove and step samples, 1D and 2D gratings and spherical nanoparticles.